Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6520020 | Method and apparatus for a direct bonded isolated pressure sensor | Mark A. Lutz, Roger L. Frick, Fred C. Sittler | 2003-02-18 |
| 6516671 | Grain growth of electrical interconnection for microelectromechanical systems (MEMS) | Mark G. Romo, Stanley E. Rud, Jr., Mark A. Lutz, Fred C. Sittler | 2003-02-11 |