Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654424 | Method and device for tuning a first oscillator with a second oscillator and rotation rate sensor | Andreas Thomae, Johannes Artzner, Reinhard Neul, Georg Bischopink, Karsten Funk | 2003-11-25 |
| 6571629 | Micromechanical spring structure, in particular, for a rotation rate sensor | Andreas Kipp, Joerg Hauer, Siegbert Geotz | 2003-06-03 |
| 6536282 | Sensor, composed of a multilayer substrate, having a spring element that is delineated out of a semiconductor layer | Andreas Kipp, Joerg Hauer | 2003-03-25 |
| 6524923 | Integrated adjustable capacitor | Karsten Funk, Detlef Clawin | 2003-02-25 |
| 6521965 | Integrated pressure sensor | — | 2003-02-18 |