Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6571629 | Micromechanical spring structure, in particular, for a rotation rate sensor | Joerg Hauer, Siegbert Geotz, Markus Lutz | 2003-06-03 |
| 6536282 | Sensor, composed of a multilayer substrate, having a spring element that is delineated out of a semiconductor layer | Joerg Hauer, Markus Lutz | 2003-03-25 |