Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6619901 | Method and apparatus for air guidance in a processing chamber | Thomas Hertfelder, Eberhard Jost, Lothar Gail | 2003-09-16 |
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Berthold Duethorn
Overall (2003): #258,260 of 273,478Top 95%
1
Patents 2003