Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6626971 | Method and device for protecting persons and/or products from air-borne particles | Rainald Forbert, Ekkehard Eigenherr | 2003-09-30 |
| 6619901 | Method and apparatus for air guidance in a processing chamber | Berthold Duethorn, Thomas Hertfelder, Eberhard Jost | 2003-09-16 |