Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6602722 | Process for fabricating capacitor having dielectric layer with pervskite structure and apparatus for fabricating the same | Ichiro Yamamoto, Yoshitake Kato | 2003-08-05 |
| 6596602 | Method of fabricating a high dielectric constant metal oxide capacity insulator film using atomic layer CVD | Tomoe Yamamoto | 2003-07-22 |