Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596602 | Method of fabricating a high dielectric constant metal oxide capacity insulator film using atomic layer CVD | Toshihiro Iizuka | 2003-07-22 |
| 6518142 | Fabrication method for MIM capacitive circuit having little leakage current | — | 2003-02-11 |