Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642142 | Substrate cleaning method and method for producing an electronic device | Toshihiko Nagai, Hiroshi Tanaka, Naoki Yokoi, Yasuhiro Asaoka | 2003-11-04 |
| 6586145 | Method of fabricating semiconductor device and semiconductor device | Naoki Yokoi, Hiroshi Tanaka, Yasuhiro Asaoka, Toshihiko Nagai | 2003-07-01 |
| 6531381 | Method and apparatus for cleaning semiconductor device and method of fabricating semiconductor device | Yasuhiro Asaoka, Hiroshi Tanaka, Naoki Yokoi, Toshihiko Nagai | 2003-03-11 |