Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642142 | Substrate cleaning method and method for producing an electronic device | Toshihiko Nagai, Hiroshi Tanaka, Yasuhiro Asaoka, Seiji Muranaka | 2003-11-04 |
| 6596630 | Method of cleaning a silicon substrate after blanket depositing a tungsten film by dipping in a solution of hydrofluoric acid, hydrochloric acid, and/or ammonium hydroxide | — | 2003-07-22 |
| 6586145 | Method of fabricating semiconductor device and semiconductor device | Hiroshi Tanaka, Yasuhiro Asaoka, Seiji Muranaka, Toshihiko Nagai | 2003-07-01 |
| 6531381 | Method and apparatus for cleaning semiconductor device and method of fabricating semiconductor device | Yasuhiro Asaoka, Hiroshi Tanaka, Seiji Muranaka, Toshihiko Nagai | 2003-03-11 |