Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620699 | Method for forming inside nitride spacer for deep trench device DRAM cell | Prakash Dev | 2003-09-16 |
| 6586300 | Spacer assisted trench top isolation for vertical DRAM's | Klaus Hummler | 2003-07-01 |