Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620677 | Support liner for isolation trench height control in vertical DRAM processing | — | 2003-09-16 |
| 6617213 | Method for achieving high self-aligning vertical gate studs relative to the support isolation level | — | 2003-09-09 |
| 6586300 | Spacer assisted trench top isolation for vertical DRAM's | Arnd Scholz | 2003-07-01 |
| 6573136 | Isolating a vertical gate contact structure | — | 2003-06-03 |