Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657759 | Bistable micromirror with contactless stops | — | 2003-12-02 |
| 6625342 | Systems and methods for overcoming stiction using a lever | Bevan Staple, David Anderson | 2003-09-23 |
| 6616853 | Method for reducing leaching in metal-coated MEMS | Bevan Staple, David E. Miller | 2003-09-09 |
| 6525352 | Method to reduce release time of micromachined devices | Bevan Staple | 2003-02-25 |
| 6517734 | Grating fabrication process using combined crystalline-dependent and crystalline-independent etching | Kenneth Edmund Arnett, Larry Fabiny, Kristofer Stefan Josef Pister | 2003-02-11 |