Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6625342 | Systems and methods for overcoming stiction using a lever | David Anderson, Lilac Muller | 2003-09-23 |
| 6616853 | Method for reducing leaching in metal-coated MEMS | David E. Miller, Lilac Muller | 2003-09-09 |
| 6600591 | Micromirror array having adjustable mirror angles | Robert Anderson, Richard Roth | 2003-07-29 |
| 6535319 | Free-space optical wavelength routing element based on stepwise controlled tilting mirrors | Victor Buzzetta, David J. Marinelli | 2003-03-18 |
| 6525352 | Method to reduce release time of micromachined devices | Lilac Muller | 2003-02-25 |