Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624094 | Method of manufacturing an interlayer dielectric film using vacuum ultraviolet CVD with Xe2 excimer lamp and silicon atoms | Kiyohiko Toshikawa, Yoshikazu Motoyama, Yousuke Motokawa, Yusuke Yagi, Junichi Miyano +1 more | 2003-09-23 |