Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656854 | Method of forming a low dielectric constant film with tetramethylcyclotetrasiloxane (TMCTS) and LPCVD technique | Kiyohiko Toshikawa, Yoshikazu Motoyama | 2003-12-02 |
| 6627560 | Method of manufacturing semiconductor device | Kiyohiko Toshikawa, Yoshikazu Motoyama | 2003-09-30 |
| 6624094 | Method of manufacturing an interlayer dielectric film using vacuum ultraviolet CVD with Xe2 excimer lamp and silicon atoms | Kiyohiko Toshikawa, Yoshikazu Motoyama, Yousuke Motokawa, Yusuke Yagi, Tetsurou Yokoyama +1 more | 2003-09-23 |