Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6601314 | Method of manufacturing alignment mark | Satoshi Machida | 2003-08-05 |
| 6589385 | Resist mask for measuring the accuracy of overlaid layers | Satoshi Machida | 2003-07-08 |
| 6562188 | Resist mask for measuring the accuracy of overlaid layers | Satoshi Machida | 2003-05-13 |
| 6559063 | Method for manufacturing semiconductor wafer having resist mask with measurement marks for measuring the accuracy of overlay of a photomask | Satoshi Machida | 2003-05-06 |