Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537416 | Wafer chuck for use in edge bevel removal of copper from silicon wafers | Steven T. Mayer, Steve Taatjes, Andy McCutcheon, Jinbin Feng | 2003-03-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537416 | Wafer chuck for use in edge bevel removal of copper from silicon wafers | Steven T. Mayer, Steve Taatjes, Andy McCutcheon, Jinbin Feng | 2003-03-25 |