Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652718 | Use of RF biased ESC to influence the film properties of Ti and TiN | Gerard C. D'Couto, Michal Danek | 2003-11-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652718 | Use of RF biased ESC to influence the film properties of Ti and TiN | Gerard C. D'Couto, Michal Danek | 2003-11-25 |