Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656831 | Plasma-enhanced chemical vapor deposition of a metal nitride layer | Ted Guo | 2003-12-02 |
| 6528180 | Liner materials | Ted Guo, Gongda Yao | 2003-03-04 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656831 | Plasma-enhanced chemical vapor deposition of a metal nitride layer | Ted Guo | 2003-12-02 |
| 6528180 | Liner materials | Ted Guo, Gongda Yao | 2003-03-04 |