ST

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MT Mattson Technology: 1 patents #9 of 31Top 30%
📍 Ottawa, CA: #111 of 465 inventorsTop 25%
Overall (2003): #117,581 of 273,478Top 45%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6600138 Rapid thermal processing system for integrated circuits Markus Hauf, Yao Zhi Hu 2003-07-29