Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6614005 | Device and method for thermally treating substrates | Heinrich Walk, Roland Mader, Werner Blersch | 2003-09-02 |
| 6600138 | Rapid thermal processing system for integrated circuits | Sing-Pin Tay, Yao Zhi Hu | 2003-07-29 |
| 6561694 | Method and device for calibrating measurements of temperatures independent of emissivity | Wilfried Lerch | 2003-05-13 |