Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641962 | Micro devices manufacturing method utilizing concave and convex alignment mark patterns | Kazuya Ota, Masahiko Yasuda | 2003-11-04 |
| 6566022 | Micro devices manufacturing method and apparatus therefor | Kazuya Ota, Masahiko Yasuda | 2003-05-20 |