Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641962 | Micro devices manufacturing method utilizing concave and convex alignment mark patterns | Shinji Mizutani, Kazuya Ota | 2003-11-04 |
| 6566022 | Micro devices manufacturing method and apparatus therefor | Shinji Mizutani, Kazuya Ota | 2003-05-20 |
| 6549271 | Exposure apparatus and method | Masahiro Nei, Yuuki Ishii, Tetsuo Taniguchi | 2003-04-15 |