Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6507641 | X-ray-generation devices, X-ray microlithography apparatus comprising same, and microelectronic-device fabrication methods utilizing same | Hiroyuki Kondo, Katsuhiko Murakami, Katsumi Sugisaki | 2003-01-14 |
| 6504900 | Optical sample X-ray testing apparatus and method for testing optical sample with X-rays | Hiroyuki Kondo | 2003-01-07 |