Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6522716 | Multilayer-film reflective mirrors, extreme UV microlithography apparatus comprising same, and microelectronic-device manufacturing methods utilizing same | Yutaka Ichihara | 2003-02-18 |
| 6522717 | Reflective-type soft x-ray microscope | Hiroyuki Kondo | 2003-02-18 |
| 6507641 | X-ray-generation devices, X-ray microlithography apparatus comprising same, and microelectronic-device fabrication methods utilizing same | Hiroyuki Kondo, Masayuki Shiraishi, Katsumi Sugisaki | 2003-01-14 |