Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6556278 | Exposure/imaging apparatus and method in which imaging characteristics of a projection optical system are adjusted | Masashi Tanaka, Kinya Kato, Masaki Kato, Hiroshi Chiba, Hiroshi Shirasu | 2003-04-29 |
| 6509954 | Aperture stop having central aperture region defined by a circular ARC and peripheral region with decreased width, and exposure apparatus and method | Masashi Tanaka, Kinya Kato | 2003-01-21 |