Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6570641 | Projection exposure apparatus | Tomohide Hamada, Yukio Kakizaki, Kinya Kato | 2003-05-27 |
| 6556278 | Exposure/imaging apparatus and method in which imaging characteristics of a projection optical system are adjusted | Masashi Tanaka, Masato Kumazawa, Kinya Kato, Masaki Kato, Hiroshi Chiba | 2003-04-29 |