Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635881 | Charged-particle-beam projection-lens system exhibiting reduced blur and geometric distortion, and microlithography apparatus including same | Atsushi Yamada, Koichi Kamijo | 2003-10-21 |
| 6627899 | Magnetic lenses, charged-particle-beam optical systems, and charged-particle-beam pattern-transfer apparatus | — | 2003-09-30 |
| 6621090 | Electron-beam sources exhibiting reduced spherical aberration, and microlithography apparatus comprising same | — | 2003-09-16 |
| 6608313 | Methods and devices for achieving alignment of a beam-propagation axis with a center of an aperture in a charged-particle-beam optical system | — | 2003-08-19 |
| 6545282 | Apparatus and methods for reducing Coulombic blur in charged-particle-beam microlithography | — | 2003-04-08 |