Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649288 | Nitride film | Tomohiko Shibata, Mitsuhiro Tanaka | 2003-11-18 |
| 6649493 | Method for fabricating a III nitride film, and underlayer for fabricating a III nitride film and a method for fabricating the same underlayer | Keiichiro Asai, Tomohiko Shibata, Mitsuhiro Tanaka | 2003-11-18 |
| 6623877 | III nitride epitaxial wafer and usage of the same | Tomohiko Shibata, Mitsuhiro Tanaka | 2003-09-23 |
| 6554896 | Epitaxial growth substrate and a method for producing the same | Keiichiro Asai, Tomohiko Shibata | 2003-04-29 |