Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649493 | Method for fabricating a III nitride film, and underlayer for fabricating a III nitride film and a method for fabricating the same underlayer | Tomohiko Shibata, Yukinori Nakamura, Mitsuhiro Tanaka | 2003-11-18 |
| 6597023 | Semiconductor light-detecting element | Tomohiko Shibata, Shigeaki Sumiya, Mitsuhiro Tanaka | 2003-07-22 |
| 6554896 | Epitaxial growth substrate and a method for producing the same | Tomohiko Shibata, Yukinori Nakamura | 2003-04-29 |