Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605549 | Method for improving nucleation and adhesion of CVD and ALD films deposited onto low-dielectric-constant dielectrics | Jihperng Leu, Chih-I Wu, Grant Kloster | 2003-08-12 |