Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605549 | Method for improving nucleation and adhesion of CVD and ALD films deposited onto low-dielectric-constant dielectrics | Chih-I Wu, Ying Zhou, Grant Kloster | 2003-08-12 |
| 6605874 | Method of making semiconductor device using an interconnect | Christopher D. Thomas | 2003-08-12 |