Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617080 | Photomask, semiconductor device, and method for exposing through photomask | Toshihide Kawachi, Takuya Matsushita, Shigenori Yamashita, Atsushi Ueno, Shinroku Maejima | 2003-09-09 |
| 6570643 | Semiconductor device, manufacturing method thereof and semiconductor manufacturing system | Yasuhiro Sato, Hajime Matsumoto | 2003-05-27 |