Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617080 | Photomask, semiconductor device, and method for exposing through photomask | Toshihide Kawachi, Shigenori Yamashita, Yuki Miyamoto, Atsushi Ueno, Shinroku Maejima | 2003-09-09 |
| 6514122 | System for manufacturing semiconductor device utilizing photolithography technique | Takayuki Saito, Tadashi Miyagi | 2003-02-04 |