Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645677 | Dual layer reticle blank and manufacturing process | — | 2003-11-11 |
| 6624878 | Laser writer | Leif Odselius, Anders Thuren, Stefan Gullstrand | 2003-09-23 |
| 6624880 | Method and apparatus for microlithography | Hubert Karl Lakner, Peter DÜRR | 2003-09-23 |
| 6618185 | Defective pixel compensation method | — | 2003-09-09 |
| 6605816 | Reticle and direct lithography writing strategy | — | 2003-08-12 |
| 6529266 | Device and method for flat holding of a substrate in microlithography | — | 2003-03-04 |
| 6504644 | Modulator design for pattern generator | — | 2003-01-07 |