Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624880 | Method and apparatus for microlithography | Torbjorn Sandstrom, Peter DÜRR | 2003-09-23 |
HL
Hubert Karl Lakner
Max-Planck-Gesellschaft Zur Föderung Der Wissenschaften E.V.: 1 patents #18 of 231Top 8%
Overall (2003): #208,420 of 273,478Top 80%
1
Patents 2003