Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630410 | Self-aligned PECVD etch mask | Kevin G. Donohoe | 2003-10-07 |
| 6569774 | Method to eliminate striations and surface roughness caused by dry etch | — | 2003-05-27 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630410 | Self-aligned PECVD etch mask | Kevin G. Donohoe | 2003-10-07 |
| 6569774 | Method to eliminate striations and surface roughness caused by dry etch | — | 2003-05-27 |