Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6577379 | Method and apparatus for shaping and/or orienting radiation irradiating a microlithographic substrate | Ulrich Boettiger | 2003-06-10 |
| 6545829 | Method and device for improved lithographic critical dimension control | Ulrich Boettiger, Steve W. Bowes | 2003-04-08 |
| 6538830 | Method and device for improved lithographic critical dimension control | Ulrich Boettiger, Steve W. Bowes | 2003-03-25 |