Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645703 | Methods of photo-processing photoresist | Ziad R. Hatab, Tony C. Krauth | 2003-11-11 |
| 6576055 | Method and apparatus for controlling air over a spinning microelectronic substrate | — | 2003-06-10 |
| 6569241 | Substrate spinning apparatus | Brian F. Gordon | 2003-05-27 |
| 6555276 | Substrate coating and semiconductor processing method of improving uniformity of liquid deposition | Brian F. Gordon | 2003-04-29 |
| 6548110 | Process liquid dispense method and apparatus | — | 2003-04-15 |
| 6548111 | Method for controlling a temperature of a microelectronic substrate | — | 2003-04-15 |