Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6551940 | Undoped silicon dioxide as etch mask for patterning of doped silicon dioxide | — | 2003-04-22 |
| 6537922 | Etchant with selectivity for doped silicon dioxide over undoped silicon dioxide and silicon nitride, processes which employ the etchant, and structures formed thereby | Li Li, Guy T. Blalock | 2003-03-25 |