Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649883 | Method of calibrating a semiconductor wafer drying apparatus | James C. Lenk, Philip Schmidt, Craig Spohr, Leslie George Stanton | 2003-11-18 |
| 6520191 | Carrier for cleaning silicon wafers | Hiroyuki Kurokawa | 2003-02-18 |