Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667244 | Method for etching sidewall polymer and other residues from the surface of semiconductor devices | John Kevin Donoghue, Kristel Van Baekel, Chan-Yun Lee | 2003-12-23 |
| 6605226 | Method for increased workpiece throughput | Albert Wang, Scott J. Baron, Prasad Padmanabhan | 2003-08-12 |