Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667244 | Method for etching sidewall polymer and other residues from the surface of semiconductor devices | Gerald M. Cox, John Kevin Donoghue, Chan-Yun Lee | 2003-12-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667244 | Method for etching sidewall polymer and other residues from the surface of semiconductor devices | Gerald M. Cox, John Kevin Donoghue, Chan-Yun Lee | 2003-12-23 |