Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6671078 | Electrostatic zipper actuator optical beam switching system and method of operation | Dale C. Flanders | 2003-12-30 |
| 6647088 | Production of a dense mist of micrometric droplets in particular for extreme UV lithography | Olivier Sublemontier | 2003-11-11 |
| 6541676 | Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions | Aleksander Franz, Klavs F. Jensen, Samara Firebaugh | 2003-04-01 |
| 6538798 | Process for fabricating stiction control bumps on optical membrane via conformal coating of etch holes | Michael F. Miller | 2003-03-25 |