Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6608711 | Silicon on insulator optical membrane structure for fabry-perot MOEMS filter | Dale C. Flanders, Peter S. Whitney | 2003-08-19 |
| 6538798 | Process for fabricating stiction control bumps on optical membrane via conformal coating of etch holes | Martin Schmidt | 2003-03-25 |
| 6525880 | Integrated tunable fabry-perot filter and method of making same | Dale C. Flanders, Peter S. Whitney, Minh Le, Stanley R. Shanfield | 2003-02-25 |