Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654132 | Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers | Charles W. Schietinger, Dmitry Bakin | 2003-11-25 |
| 6572265 | In situ optical surface temperature measuring techniques and devices | John P. Gotthold, Surinder S. Sandhu, John Leonard Shaver, Terry M. Stapleton | 2003-06-03 |