Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656805 | METHOD OF REDUCING SILICON OXYNITRIDE GATE INSULATOR THICKNESS IN SOME TRANSISTORS OF A HYBRID INTEGRATED CIRCUIT TO OBTAIN INCREASED DIFFERENTIAL IN GATE INSULATOR THICKNESS WITH OTHER TRANSISTORS OF THE HYBRID CIRCUIT | Arvind Kamath, Ravindra M. Kapre | 2003-12-02 |
| 6586814 | Etch resistant shallow trench isolation in a semiconductor wafer | David Chan, Arvind Kamath, Ken Rafftesaeth, Venkatesh P. Gopinath | 2003-07-01 |
| 6562729 | Silicon nitride and silicon dioxide gate insulator transistors and method of forming same in a hybrid integrated circuit | Arvind Kamath, Mohammad Mirabedini | 2003-05-13 |
| 6521549 | METHOD OF REDUCING SILICON OXYNITRIDE GATE INSULATOR THICKNESS IN SOME TRANSISTORS OF A HYBRID INTEGRATED CIRCUIT TO OBTAIN INCREASED DIFFERENTIAL IN GATE INSULATOR THICKNESS WITH OTHER TRANSISTORS OF THE HYBRID CIRCUIT | Arvind Kamath, Ravindra M. Kapre | 2003-02-18 |