Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653058 | Methods for reducing profile variation in photoresist trimming | Yosias Melaku | 2003-11-25 |
| 6618638 | Method for scaling processes between different etching chambers and wafer sizes | Stanley C. Siu | 2003-09-09 |
| 6577915 | Applications of a semi-empirical, physically based, profile simulator | David Cooperberg | 2003-06-10 |