Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6618638 | Method for scaling processes between different etching chambers and wafer sizes | Vahid Vahedi | 2003-09-09 |
| 6553853 | Plasma probe and method for making same | Ricky Marsh | 2003-04-29 |