Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670278 | Method of plasma etching of silicon carbide | Helen Zhu, S. M. Reza Sadjadi, David R. Pirkle, James R. Bowers, Michael Goss | 2003-12-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670278 | Method of plasma etching of silicon carbide | Helen Zhu, S. M. Reza Sadjadi, David R. Pirkle, James R. Bowers, Michael Goss | 2003-12-30 |