SL

Si Yi Li

Lam Research: 1 patents #78 of 202Top 40%
📍 Fremont, CA: #271 of 770 inventorsTop 40%
🗺 California: #8,996 of 28,521 inventorsTop 35%
Overall (2003): #117,741 of 273,478Top 45%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6670278 Method of plasma etching of silicon carbide Helen Zhu, S. M. Reza Sadjadi, David R. Pirkle, James R. Bowers, Michael Goss 2003-12-30